Improving periodic uniformity of area-type LIPSS on Si wafer using a flat-top beam femtosecond NIR laser
| Autor: | Junha Choi, Young-Gwan Shin, Kwangwoo Cho, Won-Seok Chang, Sunghwan Chang, Sung-Hak Cho |
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| Rok vydání: | 2023 |
| Předmět: | |
| Zdroj: | Japanese Journal of Applied Physics. 62:052001 |
| ISSN: | 1347-4065 0021-4922 |
| DOI: | 10.35848/1347-4065/acd094 |
| Popis: | Fabrication of line- and area-type laser-induced periodic surface structures (LIPSS) induced by a flat-top beam provides improved periodic uniformity in structure compared to fabrication with a Gaussian beam. Improved periodic uniformity induces high reproducibility and high performance through signal uniformity. Especially, this characteristic makes LIPSS induced by flat-top beam can be applied in structural color, hydrophobicity control and surface-enhanced Raman scattering. To demonstrate the improved periodic uniformity, the periods of the LIPSSs induced by Gaussian and flat-top beams are analyzed. Period uniformity is evaluated by applying the fast Fourier transformation to atomic force microscopy data. Improved periodic uniformity is observed in the area-type LIPSS induced by a flat-top beam. This is because of the peak of line width induced by the Gaussian beam profile characteristic. Consequently, area-type LIPSSs induced by a flat-top beam exhibit improved periodic uniformity. |
| Databáze: | OpenAIRE |
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