Test Structure for Characterizing Low Voltage Coplanar EWOD System
| Autor: | William Parkes, Yifan Li, Yoshio Mita, Masanori Kubota, L.I. Haworth, Anthony J. Walton |
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| Rok vydání: | 2009 |
| Předmět: |
Materials science
business.industry Microfluidics Electrical engineering Integrated circuit Dielectric Condensed Matter Physics Industrial and Manufacturing Engineering Electronic Optical and Magnetic Materials Amorphous solid law.invention law Electrode Electrowetting Optoelectronics Electrical and Electronic Engineering business Low voltage Voltage |
| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. 22:88-95 |
| ISSN: | 0894-6507 |
| Popis: | This paper presents test structures designed for studying the relationship between the operating voltage and different electrode configurations and areas for coplanar electrowetting on dielectrics (EWOD) devices. New test structures have been designed and fabricated using anodic Ta2O5 dielectric and thin aFP (amorphous Fluoropolymer CYTOP from Asahi Glass Co., Ltd.). These test structures have been used to characterize the contact angle change, which is between 114deg and 81deg with an applied voltage of less than 20 V. This demonstrates that by modifying the coplanar architecture, the operating voltage can be reduced by a factor of two, compared to previously reported coplanar EWOD structures. Droplet manipulation on a coplanar EWOD system with this new design has been successfully demonstrated, with a driving voltage of 15 V. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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