Correlation between x-ray reflectivity measurements and surface roughness of AXAF coated witness samples

Autor:	Alvin J. Drehman, Anna M. Clark, Pearl Yip, R. Bruni, Leon P. Van Speybroeck, Daniel A. Schwartz, Alan P. Shapiro, Suzanne Romaine
Rok vydání:	1996
Předmět:	X-ray reflectivity Optics Materials science business.industry Atomic force microscopy Surface roughness Polishing Spectral density Angstrom business Reflectivity Metrology
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.245102
Popis:	One of the specifications used to polish the AXAF witness samples was that the rms surface roughness be
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a54fc6641bc460a7a77ae90b57f1c7bb https://doi.org/10.1117/12.245102 Zobrazit plný text záznamu