TEM study of diffused n+/p junctions produced by KrF excimer laser thermal annealing

Autor:	T-Y Seong, Su-Young Lee, M-G Han, C-J Choi
Rok vydání:	2018
Předmět:	Materials science Excimer laser business.industry medicine.medical_treatment medicine Optoelectronics business
Zdroj:	Microscopy of Semiconducting Materials 2001 ISBN: 9781351074629 Microscopy of Semiconducting Materials 2001
DOI:	10.1201/9781351074629-94
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a534296a8e5e5bf6e82d727b0ef422e7 https://doi.org/10.1201/9781351074629-94