Nonlinear Optical Laser Surface Profilometer

Autor: S. R. Melikyan
Rok vydání: 2015
Předmět:
Zdroj: Measurement Techniques. 57:1352-1355
ISSN: 1573-8906
0543-1972
DOI: 10.1007/s11018-015-0633-2
Popis: A new nonlinear optical laser surface profilometer with micron surface resolution is considered. It is shown that with a resolution of the spectrometer of 0.23 nm the spatial resolution of the proposed method may reach 22.5 μm.
Databáze: OpenAIRE