Nanoprobing-Based EBAC Technique from Backside as Well as Frontside to Isolate Logic Fails for Otherwise Non Visual Defects

Autor: Sreenath Arva, Karthik Kalaiazhagan, Lucile C. Teague Sheridan, Satish Kodali, Chong Khiam Oh
Rok vydání: 2017
Předmět:
Zdroj: International Symposium for Testing and Failure Analysis.
ISSN: 0890-1740
Popis: This paper presents unique case studies describing the use of EBAC technique. Front as well as backside EBAC on relatively smaller nets is presented to isolate logic fails which are otherwise hard to capture using conventional failure analysis techniques.
Databáze: OpenAIRE