Techniques for Measuring Rate Constants for Acid Generation from PAG (Photo Acid Generator) during ArF Exposure

Autor:	Atsushi Seguchi, Yoshiyuki Kono, Fumihiko Oda, Yukihiro Morimoto
Rok vydání:	2008
Předmět:	Materials science Polymers and Plastics Organic Chemistry Analytical chemistry Photochemistry Excimer Laser Excimer lamp Fourier transform spectroscopy law.invention Reaction rate constant Resist law Materials Chemistry
Zdroj:	Journal of Photopolymer Science and Technology. 21:69-73
ISSN:	1349-6336 0914-9244
DOI:	10.2494/photopolymer.21.69
Popis:	We previously performed in situ FT-IR measurements while subjecting chemically-amplified resists to UV light (248 nm) to observe photodecomposition of the PAG for KrF excimer lasers. Based on these observations, we measured rate constants for acid generation associated with PAG photodecomposition. More recently, we equipped our FT-IR system with a 193-nm excimer lamp (developed by Ushio Inc.) to perform the world's first in situ observations of PAG photodecomposition using 193-nm light. Our report also describes the successful measurement of rate constants for acid generation from the PAG for ArF excimer lasers.
Databáze:	OpenAIRE
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