Resonance phenomena in microwave nonmagnetized plasma source. Plasmachemical application

Autor:	M. Misakyan, I. M. Taktakishvili, V. A. Kop’ev, I. A. Kossyi, N. K. Berezhetskaya, S. M. Temchin, Young dong Lee
Rok vydání:	2008
Předmět:	Chemistry Resonance Plasma Condensed Matter Physics Ion source Electronic Optical and Magnetic Materials Electric discharge in gases Physics::Plasma Physics Ionization Atomic physics Coaxial Instrumentation Plasmatron Microwave
Zdroj:	The European Physical Journal Applied Physics. 42:327-337
ISSN:	1286-0050 1286-0042
Popis:	Scheme of coaxial microwave gas-discharge plasma source based on a “plasma resonance” phenomenon is presented. Possibility of conditions realization at which energy of accelerated in the “resonance” electrons goes into ionization processes (in volume of chamber outside of “resonance” region) is discussed. Results of experimental investigation of a coaxial microwave plasmatron in which “resonance” mechanisms have been manifested are presented. A plasmachemical reactor based on a “resonance” plasmatron is described. The data on plasmachemical decomposition of CF 2 Cl 2 are displayed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a4bae6ded984411a0fc97e08e1a48959 https://doi.org/10.1051/epjap:2008074 Zobrazit plný text záznamu