Lithium niobate on insulator (LNOI) for micro-photonic devices
| Autor: | Peter Günter, Hui Hu, Wolfgang Sohler, Gorazd Poberaj |
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| Rok vydání: | 2012 |
| Předmět: |
Materials science
business.industry Wafer bonding Photonic integrated circuit Lithium niobate Condensed Matter Physics Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials chemistry.chemical_compound Resonator chemistry Optoelectronics Wafer Thin film Photonics business Photonic crystal |
| Zdroj: | Laser & Photonics Reviews. 6:488-503 |
| ISSN: | 1863-8880 |
| Popis: | The state-of-the-art of high-refractive-index-contrast single-crystalline thin lithium niobate (LiNbO3) films as a new platform for high-density integrated optics is reviewed. Sub-micrometer thin LiNbO3 films are obtained by “ion-slicing”. They can be bonded by two different techniques to a low-index substrate to obtain “lithium niobate on insulator” (LNOI) even as wafer of 3” diameter. Different micro- and nano-structuring techniques have been used to successfully develop micro-photonic devices. To be specific, the fabrication and characterization of LNOI photonic wires with cross-section < 1 µm2, periodically poled LNOI photonic wires for second harmonic generation, electro-optically tunable microring resonators, free standing microrings for hybrid integration, and photonic crystal structures are described. |
| Databáze: | OpenAIRE |
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