The Present Status of Development of Inductively Coupled Plasma Simulator based on Fluid Model
| Autor: | N.S. Yoon, D.C. Kwon |
|---|---|
| Rok vydání: | 2009 |
| Předmět: |
Chemistry
business.industry Materials Science (miscellaneous) Surface reaction Condensed Matter Physics Collision Electron heating Development (differential geometry) Electrical and Electronic Engineering Physical and Theoretical Chemistry Inductively coupled plasma Neutral particle business Simulation Graphical user interface |
| Zdroj: | Journal of the Korean Vacuum Society. 18:151-163 |
| ISSN: | 1225-8822 |
| DOI: | 10.5757/jkvs.2009.18.3.151 |
| Popis: | The domestic development status of Inductively Coupled Plasma (ICP) simulator which is based on fluid model is explained. As each part which composes the unified simulator, electron heating module, charged and neutral particle transport module, surface reaction module including a sheath model, and GUI (Graphic User Interface) with pre- and post-processors are described in order. Also, we present data base status of chemical reaction and physical collision, which has been applied to the recently developed simulator until now. Lastly, some future plans of development are suggested. |
| Databáze: | OpenAIRE |
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