Implementation of multi-opening orifices in the primary metrology of vacuums and small gas throughputs

Autor:	Dominik Pražák, L. Peksa, Martin Vičar, T. Gronych, M. Jeřáb, Z. Krajíček, F. Staněk
Rok vydání:	2014
Předmět:	Chemistry Analytical chemistry Mechanical engineering Orifice plate Condensed Matter Physics Restrictive flow orifice Surfaces Coatings and Films Metrology Physics::Fluid Dynamics Free molecular flow Flow conditioning Flow coefficient Duct (flow) Instrumentation Body orifice
Zdroj:	Vacuum. 101:377-381
ISSN:	0042-207X
DOI:	10.1016/j.vacuum.2013.10.014
Popis:	A multi-opening orifice is a device for the primary measurement of gas flows and related vacuum quantities. This device maintains a constant molecular flow regime and thus the possibility to very accurately calculate the conductance from the geometrical dimensions for relatively high pressures, and the value of the conductance is sufficiently high to achieve reasonable parameters of the vacuum system in use. Suitable shapes of a multi-opening orifice duct and the principles of multi-opening orifice design are discussed. An example of the multi-opening orifice manufactured with grinding is given. The limits and requirements for further development are drafted.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a471d6e1bce70e4105d1295484d4477a https://doi.org/10.1016/j.vacuum.2013.10.014 Zobrazit plný text záznamu Full Text from ScienceDirect