Optical Coherence Microscopy for Integrated Photonics Devices Imaging

Autor: Vladimir O. Bessonov, Daniil V. Akhremenkov, Evgeny V. Lyubin, Vitalina Vigdorchik, Maxim A. Sirotin, Maria N. Romodina, Kirill R. Safronov, Irina V. Soboleva, Andrey A. Fedyanin
Rok vydání: 2021
Předmět:
Zdroj: 2021 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC).
Popis: Optical coherence microscopy (OCM) is a method of three-dimensional visualization of micro-objects based on a combination of optical coherence tomography (OCT) and confocal microscopy [1] . OCM allows three-dimensional mapping of the refractive index of the sample and has a submicron resolution [2] . In addition, one of the methods, phase-sensitive OCM, has subnanometer axial sensitivity to changes in optical path-length [3] . The submicron resolution of the OCM makes it a powerful tool for studying semitransparent objects.
Databáze: OpenAIRE