CMP Process for Phase Change Materials
| Autor: | Feng Q Liu, Chenhao Ge, Kun Xu, Mengqi Ye, Yuchun Wang, Yufei Chen, Sherry Xia, Alain Duboust, Wen-Chiang Tu, Lakshmanan Karuppiah |
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| Rok vydání: | 2009 |
| Zdroj: | ECS Meeting Abstracts. :741-741 |
| ISSN: | 2151-2043 |
| DOI: | 10.1149/ma2009-01/16/741 |
| Popis: | not Available. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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