27.1: Invited Paper: Smart‐target concept and simulation for PVD performance increase
| Autor: | Arno Plankensteiner, Harald Koestenbauer, Joerg Winkler, Hennrik Schmidt, Christian Linke |
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| Rok vydání: | 2019 |
| Zdroj: | SID Symposium Digest of Technical Papers. 50:279-279 |
| ISSN: | 2168-0159 0097-966X |
| DOI: | 10.1002/sdtp.13466 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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