RF MEMS fabrication in LTCC technology
| Autor: | Romolo Marcelli, Daniele Pochesci, Chiara Germani, Renato Croci, Ernesto Di Paola, Sergio Di Nardo, Andrea Lucibello |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Fabrication Materials science business.industry Electrical engineering 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences visual_art 0103 physical sciences Electronic engineering Redundancy (engineering) visual_art.visual_art_medium Ceramic 0210 nano-technology business Ohmic contact |
| Zdroj: | 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP). |
| DOI: | 10.1109/dtip.2016.7514866 |
| Popis: | RF MEMS in Low-Temperature Co-fired Ceramics (LTCC) technology have been designed, manufactured and tested for potential utilization in reconfigurable space sub-systems. Specifically, single-pole-single-throw (SPST) and single-pole-double-throw (SPDT) ohmic switch configurations have been studied for wide-band applications. Advantages coming from the measured RF performances and from the integration of RF MEMS by means of the LTCC technology only, to be used also for packaging, are discussed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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