| Autor: |
Eugene L. Church, Péter Takács |
| Rok vydání: |
1990 |
| Předmět: |
|
| Zdroj: |
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 291:253-264 |
| ISSN: |
0168-9002 |
| Popis: |
Great improvement has been made in the past several years in the quality of optical components used in synchrotron-radiation (SR) beam lines. Most of this progress has been the result of vastly improved metrology techniques and instrumentation permitting rapid and accurate measurement of the surface finish and figure on grazing-incidence optics. A significant theoretical effort has linked the actual performance of components used at X-ray wavelengths to their topological properties as measured by surface-profiling instruments. Next-generation advanced light sources will require optical components and systems to have sub-arcsec surface figure tolerances. We will explore the consequences of these requirements in terms of manufacturing tolerances to see if the present manufacturing state-of-the-art is capable of producing the required surfaces. It is now possible to routinely measure figure and finish on meter-long optical surfaces in our laboratory with a long trace profiler of our own design and with a commercial microinterferometer profiler. Our instrumentation allows us to analyze surface profile data in terms of the power spectral density function over the range of spatial periods that are of relevance to X-ray mirror performance: 1 m to 5 μm. We have been able to recognize several classes of problems in the manufacture of grazing-incidence optics from the results of our measurements. In some cases we have been able to provide feedback to the manufacturer, who has then been able to modify and improve his process. Results from our analyses of mirror figure and finish measurements will be presented and their impact on the design of high-resolution soft-X ray SR systems will be discussed. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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