Fabrication and Characterization of Magnetostrictive Micro-Cantilevers
| Autor: | Surajit Das, Chelvane J. Arout, Aditi Sinha, Jitendra Singh, Ramesh C. Kumar, Deepak Kumar Panwar |
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| Rok vydání: | 2018 |
| Předmět: |
0301 basic medicine
Microelectromechanical systems Bulk micromachining Materials science Cantilever Magnetometer business.industry Magnetostriction law.invention Magnetic field 03 medical and health sciences 030104 developmental biology law Deflection (engineering) Optoelectronics business Laser Doppler vibrometer |
| Zdroj: | 2018 IEEE SENSORS. |
| DOI: | 10.1109/icsens.2018.8589844 |
| Popis: | We have developed a magnetostrictive Fe6sCo35 thin film based micro-cantilevers using micro-fabrication process. The cantilever stack consists of Si/Si02/Fe6sCo35 layers for actuation and cantilever thickness was controlled by silicon bulk micromachining process. High magnetostrictive and low stress Fe/Co 65/35 composition was utilized in cantilevers. Magnetic properties of Fe6sCo35 films were investigated using vibrating sample magnetometer and laser Doppler vibrometer. Micro-cantilever dimensions were confirmed using scanning electron microscope. Magnetic actuation was performed by applied magnetic field of 2000 Oe and tip deflection was monitored using laser interferometry method. In-house dc magnetic field set-up was developed which is compatible to laser Doppler vibrometer. Using cantilever deflection method magnetostriction coefficient (λ) was found to be ~135 ppm. The developed magnetostrictive cantilever is very useful MagMEMS and low field sensing and actuation applications. |
| Databáze: | OpenAIRE |
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