Honeycomb-Structured Multi-Crystalline Silicon Solar Cells With 18.6% Efficiency Via Industrially Applicable Laser Process
| Autor: | Niinobe, D., Nishimura, K., Matsuno, S., Fujioka, H., Katsura, T., Okamoto, T., Ishihara, T., Morikawa, H., Arimoto, S. |
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| Jazyk: | angličtina |
| Rok vydání: | 2008 |
| Předmět: | |
| DOI: | 10.4229/23rdeupvsec2008-2cv.5.74 |
| Popis: | 23rd European Photovoltaic Solar Energy Conference and Exhibition, 1-5 September 2008, Valencia, Spain; 1824-1828 In this paper, we present a novel process for fabricating a hemi-spherical shape for texture structure, namely known as honeycomb structure texture, for large area multi-crystalline silicon (mc-Si) solar cells. The method is composed of laser-patterning of mask film and wet chemical etching of wafer beneath the mask film through the pattern, substituting lithographic process usually used for fabricating such structure in small scale. After the texturization process, solar cells were made by utilizing conventional fabrication equipments, i.e. phosphorus diffusion in tube furnace, anti-reflection coating by chemical vapor deposition, front and rear electrodes formation by screen printing, and contact formation by furnace. The well-controlled texture with an optimized massproduction process for fabricating high-efficiency cell contributed to improving the conversion efficiency. As the result, 18.6% in conversion efficiency was achieved with mc-Si wafer in industrial size of 15 cm x 15 cm, independently confirmed by National Institute of Advanced Industrial Science and Technology (AIST). The main fabrication processes of the development described for the cell was as follows; 1) novel texturization method by combination of laser-patterning and wet chemical etching, 2) optimization of screen printing, metallization process of firing profile condition, and emitter diffusion. |
| Databáze: | OpenAIRE |
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