MEMS Microhotplates for Chemical Sensors
| Autor: | Vladimir Levek, Zdenek Pytlicek, Silvestr Vancik, Imrich Gablech, Vojtech Svatos, Jan Prasek, Jaroslav Klempa |
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| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Materials science business.industry Heating element Mechanical engineering 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Displacement (vector) Power consumption 0103 physical sciences Microelectronics Computer modelling 0210 nano-technology business |
| Zdroj: | 2018 41st International Spring Seminar on Electronics Technology (ISSE). |
| Popis: | In this paper, we design and develop low-power MEMS based microhotplates for chemiresistive gas sensors using computer modelling and microelectronic technologies, respectively. Two geometrical designs of supporting beams of suspended membranes were designed and simulated to evaluate displacement in the structure. Two different patterns of heating elements were designed, and the power consumption was calculated. Fabricated structures are studied and compared with the theoretical data obtained from simulations. |
| Databáze: | OpenAIRE |
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