| Autor: |
Hyang Kyun (Helen) Kim, Boaz Brill, Igor Turovets, Susan Emans, Alok Vaid, Boris Sherman, Cornel Bozdog, Ronen Urensky, Matthew Sendelbach |
| Rok vydání: |
2011 |
| Předmět: |
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| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| Popis: |
Improvement in metrology performance when using a combination of multiple optical channels vs. standard single optical channel is studied. Two standard applications (gate etch 4x and STI etch 2x) are investigated theoretically and experimentally. The results show that while individual channels might have increased performance for few individual parameters each - it is the combination of channels that provides the best overall performance for all parameters. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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