Picosecond laser fabrication of microchannels inside Foturan glass at CO2 laser irradiation and following etching
| Autor: | R. O. Olekhnovich, M. M. Sergeev, Vadim P. Veiko, E. Y. Tiguntseva |
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| Rok vydání: | 2016 |
| Předmět: |
Materials science
Co2 laser Fabrication business.industry 02 engineering and technology Surface finish Photothermal therapy 021001 nanoscience & nanotechnology Laser 01 natural sciences Isotropic etching Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention 010309 optics law Etching (microfabrication) 0103 physical sciences Optoelectronics Irradiation Electrical and Electronic Engineering 0210 nano-technology business |
| Zdroj: | Optical and Quantum Electronics. 48 |
| ISSN: | 1572-817X 0306-8919 |
| DOI: | 10.1007/s11082-016-0752-2 |
| Popis: | In this work, the formation of hollow-type microchannels in the bulk of a photostructurable glass of the brand Foturan is proposed. It is based on the chemical dissolution of crystallized areas, which are formed as a result of the action of picosecond laser pulses and photothermal treatment produced by CO2 laser irradiation. A speed of formation of microchannels was estimated. Microchannels formation features at each stage of laser irradiation are discussed, and the dependence of microchannels characteristics (size, shape and roughness of inner walls) on laser processing and chemical etching parameters were evaluated as well. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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