Repeatability aspects in surface micromachining - investigations on polycrystalline silicon films
| Autor: | L Elbrecht, J Binder |
|---|---|
| Rok vydání: | 1999 |
| Předmět: |
Reproducibility
Materials science Precision engineering Silicon Mechanical Engineering chemistry.chemical_element Modulus Repeatability engineering.material Electronic Optical and Magnetic Materials Surface micromachining Polycrystalline silicon chemistry Mechanics of Materials Miniaturization engineering Electronic engineering Electrical and Electronic Engineering Composite material |
| Zdroj: | Journal of Micromechanics and Microengineering. 9:130-133 |
| ISSN: | 1361-6439 0960-1317 |
| DOI: | 10.1088/0960-1317/9/2/007 |
| Popis: | Within this paper, the repeatability of the mechanical properties of thin polysilicon films is discussed. The film thickness, mechanical stress and Young's modulus are investigated with respect to on-wafer, wafer-to-wafer and run-to-run repeatability. The repeatability is examined using micromachined test structures. Although the determined parameter variations are small compared to other publications, the effect of those variations on the characteristics of micromachined sensors is still not negligible. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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