High-precision and large-dynamic-range three-dimensional surface profilometry by comb-based time-of-flight detection

Autor:	Yongjin Na, Changmin Ahn, Chan-Gi Jeon, Jungwon Kim
Rok vydání:	2021
Předmět:	Time of flight Scanner Materials science Optics Mode-locking business.industry Detector Phase noise Repeatability Profilometer business Beam (structure)
Zdroj:	Conference on Lasers and Electro-Optics.
DOI:	10.1364/cleo_si.2021.sm1g.2
Popis:	We demonstrate high-precision (~10-nm repeatability) and large-dynamic-range (120 dB dynamic-range with ~9-mm ambiguity range) three-dimensional surface profile imaging technique by combining an optical frequency comb, an electro-optic-sampling-based timing detector, and a fast beam scanner.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a244bfaa0fa08ae90c3b150f218cd492 https://doi.org/10.1364/cleo_si.2021.sm1g.2 Zobrazit plný text záznamu