Polarization-independent and ultra-high bandwidth electroabsorption modulator in multiquantum-well deep-ridge waveguide technology
Autor: | E. Zielinski, H. Haisch, J. Weber, P. Wiedemann, R. Weinmann, E. Kuhn, E. Lach, U. Cebulla, Klaus Satzke, D. Baums, D. Kaiser |
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Rok vydání: | 1996 |
Předmět: |
Materials science
business.industry Polarization (waves) Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Gallium arsenide chemistry.chemical_compound Optics Semiconductor chemistry Chemical-mechanical planarization Chirp Optoelectronics Metalorganic vapour phase epitaxy Electrical and Electronic Engineering Reactive-ion etching business Polyimide |
Zdroj: | IEEE Photonics Technology Letters. 8:891-893 |
ISSN: | 1941-0174 1041-1135 |
DOI: | 10.1109/68.502261 |
Popis: | Electroabsorption modulators with polarization-independence of transmission (TE/TM sensitivity 23 GHz/V. Polarization insensitivity of modulator transmission and chirp is demonstrated. Technical realization has been done in ridge waveguide technology with low-pressure MOVPE, reactive ion etching (RIE) for semiconductor etching and polyimide for planarization. |
Databáze: | OpenAIRE |
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