Probe Technique for Measuring the Bohm Coefficient, Space-Charge Probe Layer Thickness, and Ion Mass

Autor:	V. A. Ryabyi, P. E. Masherov
Rok vydání:	2018
Předmět:	010302 applied physics Physics Physics and Astronomy (miscellaneous) Basis (linear algebra) Stefan–Boltzmann law chemistry.chemical_element Plasma 01 natural sciences Space charge 010305 fluids & plasmas Ion symbols.namesake Xenon chemistry Physics::Plasma Physics Torr 0103 physical sciences symbols Atomic physics Layer (electronics)
Zdroj:	Technical Physics. 63:1743-1748
ISSN:	1090-6525 1063-7842
DOI:	10.1134/s1063784218120101
Popis:	We propose measuring the Bohm coefficient, thickness of the space-charge probe layer, and ion mass in Maxwellian low-pressure plasma based on the results of standard probe measurements using the Bohm effect, Boltzmann law, and “3/2” law in the case of their validity for the studied plasma. This possibility was implemented by comprehensive probe diagnostics of high-frequency xenon plasma of an induction discharge at a pressure of 2 mTorr. Analysis of the obtained results showed that these laws and the Bohm effect are valid with “engineering” accuracy, which made it possible to find Bohm coefficient CBCyl ≈ 1.23 for a cylindrical probe, which served as the basis of the proposed method.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a224ed5fd1c2e3da87cc4d40e049e0c2 https://doi.org/10.1134/s1063784218120101 Zobrazit plný text záznamu Plný text ve formátu PDF Plný text ve formátu HTML
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