Low-Power and ppm-Level Multimolecule Detection by Integration of Self-Heated Metal Nanosheet Sensors
| Autor: | Hiroki Ishikuro, Ryota Shimizu, Kenta Tabuchi, Yohsuke Shiiki, Tsunaki Takahashi, Kohei Tatehora, Ken Uchida, Takahisa Tanaka, Shuya Nakagawa, Takeshi Yanagida, Tadahiro Kuroda |
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| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science business.industry 01 natural sciences Electronic Optical and Magnetic Materials Power (physics) Metal Power consumption visual_art 0103 physical sciences visual_art.visual_art_medium Optoelectronics Electrical and Electronic Engineering Self heating business Scaling Electronic circuit Nanosheet |
| Zdroj: | IEEE Transactions on Electron Devices. 66:5393-5398 |
| ISSN: | 1557-9646 0018-9383 |
| DOI: | 10.1109/ted.2019.2945932 |
| Popis: | H2 and NH3 detection with low power consumption was demonstrated by integrated chemiresistive Pt and PtRh nanosheet sensors on glass substrates. The self-heating effects realized low power and local heating of metal nanosheet sensors, enabling the integration of sensors with different operating temperatures. Based on different resistance changes in Pt and PtRh nanosheets toward H2 and NH3, the concentration of each gas was detected from a gas mixture by consuming around 1-mW power. For decreasing the power consumption and further integration of sensors, sensor scaling and pulsed operations were numerically and experimentally studied. In addition to good connectivity of metal nanosheet sensors to large-scale integration (LSI) circuits, improvements of the power consumption by sensor scaling were proven. The pulsed operations required for integrated sensor arrays maintained a sensor response, or a resistance change, of approximately 60%, even when the power consumption was reduced by 20%. |
| Databáze: | OpenAIRE |
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