High aspect ratio microstructures on porous anodic aluminum oxide
Autor: | M.L. Reed, Hongtao Han, Robert Addison Boudreau, Songsheng Tan |
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Rok vydání: | 2005 |
Předmět: | |
Zdroj: | Proceedings IEEE Micro Electro Mechanical Systems. 1995. |
Popis: | Various technologies have been developed to fabricate high aspect ratio microstructures on planar surfaces. In this work, we present a technology which exploits the highly ordered pore structure of anodic aluminum oxide. Using this technology, we have fabricated 120pm high microstructures with vertical side walls; we estimate millimeter high structures with aspect ratios exceeding 1000: 1 could be achieved. |
Databáze: | OpenAIRE |
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