High aspect ratio microstructures on porous anodic aluminum oxide

Autor:	M.L. Reed, Hongtao Han, Robert Addison Boudreau, Songsheng Tan
Rok vydání:	2005
Předmět:	Chemical technology Planar Materials science Porous anodic aluminum oxide Anodic Aluminum Oxide Etching Metallurgy Millimeter Composite material Microstructure Aluminum oxide
Zdroj:	Proceedings IEEE Micro Electro Mechanical Systems. 1995.
Popis:	Various technologies have been developed to fabricate high aspect ratio microstructures on planar surfaces. In this work, we present a technology which exploits the highly ordered pore structure of anodic aluminum oxide. Using this technology, we have fabricated 120pm high microstructures with vertical side walls; we estimate millimeter high structures with aspect ratios exceeding 1000: 1 could be achieved.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a1fb8743c279ad35f852644f5dc56e29 https://doi.org/10.1109/memsys.1995.472536 Zobrazit plný text záznamu