Experimental investigation for optimizing the fabrication of a sapphire capillary using femtosecond laser machining and diamond tool micromilling

Autor: Yoshinori Ogawa, Kazuo Yamazaki, Shinya Morita, Kazutoshi Katahira
Rok vydání: 2020
Předmět:
Zdroj: CIRP Annals. 69:229-232
ISSN: 0007-8506
Popis: Sapphire capillaries manufactured with high efficiency and precision are needed for use in laser–plasma accelerators. A hybrid manufacturing process combining femtosecond laser machining and diamond tool micromilling was applied. By using a femtosecond laser mounted on a 5-axis machine, a capillary with a groove width of 630 µm and length of 90 mm was fabricated on a sapphire plate within 5 h. The surface roughness of the bottom of the cylinder groove was finished to 7.1 nm in Sa by milling with a polycrystalline diamond end mill.
Databáze: OpenAIRE