Transient electro-thermal simulation of microsystems with space-continuous thermal models in an analogue behavioural simulator
| Autor: | Peter A. Fotiu, M. Jakovljevic, Zeljko Mrcarica, Vančo Litovski, Helmut Detter |
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| Rok vydání: | 2000 |
| Předmět: |
Microelectromechanical systems
Engineering business.industry Hardware description language Condensed Matter Physics Atomic and Molecular Physics and Optics Finite element method Surfaces Coatings and Films Electronic Optical and Magnetic Materials Reliability (semiconductor) Hardware_GENERAL Approximation error Microsystem Thermal Hardware_INTEGRATEDCIRCUITS Electronic engineering Transient (oscillation) Electrical and Electronic Engineering Safety Risk Reliability and Quality business computer Simulation computer.programming_language |
| Zdroj: | Microelectronics Reliability. 40:507-516 |
| ISSN: | 0026-2714 |
| DOI: | 10.1016/s0026-2714(99)00251-6 |
| Popis: | In many microsystems (MEMS), thermal effects have significant importance and system-level electro-thermal simulation is needed to shorten the product development cycle and to increase system reliability. The possibilities for space-continuous simulation of electro-thermal problems using an analogue simulator and an analogue hardware description language are described. In comparison to commercial finite element simulators, the relative error of thermal simulation is |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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