A novel method for the assessment of surface charge density variance in capacitive RF-MEMS switches
| Autor: | George J. Papaioannou, D. Birmpiliotis, Matroni Koutsoureli |
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| Rok vydání: | 2021 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry Capacitive sensing Mean value Charge density Charge (physics) Dielectric Variance (accounting) Condensed Matter Physics Capacitance Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Optoelectronics Electrical and Electronic Engineering Safety Risk Reliability and Quality business |
| Zdroj: | Microelectronics Reliability. 126:114294 |
| ISSN: | 0026-2714 |
| DOI: | 10.1016/j.microrel.2021.114294 |
| Popis: | The present paper provides a novel, inexpensive and non-destructive method to assess the surface charge density variance in capacitive RF-MEMS switches. The charge variance evolution can be monitored during charging and discharging processes by measuring the up-state capacitance, in addition to the mean value, providing results directly related to charging failure mechanisms and the prediction of the devices lifetime for unipolar/bipolar actuation. Also, the experimental results can be used to engineer the dielectric film electrical properties in order to control the surface and bulk conductivities according to needed application. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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