Electroepitaxy: the control of the kinetics and morphology of InSb

Autor: T.P Koretskaya, Z. L. Akkerman, L.A Borisova
Rok vydání: 1999
Předmět:
Zdroj: Thin Solid Films. 342:180-183
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(98)01415-1
Popis: The surface micromorphology and growth rate of InSb layers grown by liquid phase electroepitaxy (LPEE) on B(111) surface of InSb substrate were studied. The mixing of In- and Bi-solutions was used to realize the kinetic regime of crystallization. The influence of solution mixing, growth temperatures and supersaturation are manifested in different micromorphology and growth mechanisms such as dislocation-controlled facet, or the layer and terrace-layer one. The conditions to improve the flatness of the layers are determined.
Databáze: OpenAIRE