Copper Metallization of Polyimide Film by Excimer Laser Irradiation and Electrodeposition

Autor:	Michael J. Kelley, James L. Hohman, Kenneth Bernard Keating
Rok vydání:	1994
Předmět:	Materials science chemistry Electrical resistivity and conductivity Polyamide chemistry.chemical_element Excimer laser irradiation Irradiation Conductivity Composite material Copper Polyimide Kapton
Zdroj:	MRS Proceedings. 354
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-354-571
Popis:	Severe excimer laser irradiation is reported to impart electrical conductivity to Kapton* polymide films. We find that a proper choice of pretreatment and irradiation practice reduces the required dose markedly. Such films have sufficient conductivity to permit direct, good-quality, adherent copper electroplating.H.M.Phillips, D.L.Callahan, R.Sauerbrey, G.Szabo and Z.Bor; Appl.Phys.Lett.58, 2761 (1991).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a0ce2bed76fc6cada960e8ecdb88d4c3 https://doi.org/10.1557/proc-354-571 Zobrazit plný text záznamu Full text from SpringerLink