| Autor: |
Gung-Chian Yin, Duan-Jen Wang, Chih-Yu Hua, Ming-Ying Hsu, Hok-Sum Fung, Shang-Wei Lin |
| Rok vydání: |
2020 |
| Předmět: |
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| Zdroj: |
Advances in Metrology for X-Ray and EUV Optics IX. |
| DOI: |
10.1117/12.2570538 |
| Popis: |
To achieve an ultrahigh-resolution for soft X-ray beamlines, the slope error of a highly precise grating is required on the level of 0.1 μrad root-mean-square (RMS) under thermal loading. To realize the goal, a specially designed 25-actuator optical surface bender for the gratings and mirrors is developed and operated at Taiwan Photon Source (TPS) [1]. In this paper, the construction and operation of the in situ LTP measuring system is described[2]. This LTP consists of a switchable optical reflection system that let the LTP can switch to measure horizontal or vertical mounting mirrors/gratings in the beamline. The other is a low optical distortion and bakeable to 120 ˚C glass viewport which is used for the ultra-high vacuum[3,4] interface for the beamlines optics and LTP. The surface slope error being reduced down to 0.1 and 0.15 μrad (RMS) by the 25-actuator bender without/with the glass viewport as verified by the in situ LTP measurements in the beamline. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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