Autor:	Eun Ha Choi, In Tae Kim, Guangsup Cho, Gi-Chung Kwon, Buil Jeon, Tae-Hoon Jo, Donghae Kim, I-Hyun Cho, Myoung-Soo Yun
Rok vydání:	2012
Předmět:	Condensed Matter::Materials Science Atmospheric pressure Microplasma business.industry Condensed Matter::Superconductivity Doping Thermal Optoelectronics Condensed Matter::Strongly Correlated Electrons Wafer Plasma business Sheet resistance
Zdroj:	2012 Abstracts IEEE International Conference on Plasma Science.
DOI:	10.1109/plasma.2012.6383848
Popis:	Summary form only given. Generally, thermal doping method by furnace is used for solar-cell wafer doping. But it takes a lot of time and requires very expensive equipment.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a0a7e37738512c26c3530dc5e321ee60 https://doi.org/10.1109/plasma.2012.6383848 Zobrazit plný text záznamu