Resonant d33 Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes

Autor:	Pooja Thakkar, Anton Lagosh, Takashi Sasaki, Markus Bainschab, Jaka Pribošek
Rok vydání:	2023
Zdroj:	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a07d6f37768dd0033b896c4e02d2e760 https://doi.org/10.1109/mems49605.2023.10052304 Zobrazit plný text záznamu