Effect of annealing on electrical and optical properties of TiN thin films

Autor:	Taras T. Kovaliuk, Mykhailo M. Solovan, Andrii I. Mostovyi, Ivan G. Оrletskyi
Rok vydání:	2021
Zdroj:	Fifteenth International Conference on Correlation Optics.
DOI:	10.1117/12.2615178
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a06625674aced23f715c69701c1868b6 https://doi.org/10.1117/12.2615178 Zobrazit plný text záznamu