High -Density Quantum Nanostructure for Single Mode Distributed Feedback Semiconductor Lasers by One-Step Growth

Autor:	Jong-Hyeob Baek, Young-Ju Park, Chang-Sik Son, In-Hoon Choi, Yong Tae Kim, Hoon-Sang Choi, Seong-Il Kim
Rok vydání:	2003
Předmět:	Materials science business.industry Holography Single-mode optical fiber Grating Semiconductor laser theory law.invention Optics law Optoelectronics General Materials Science Metalorganic vapour phase epitaxy business Lithography Electron-beam lithography Photonic crystal
Zdroj:	Korean Journal of Materials Research. 13:485~490-485~490
ISSN:	2287-7258 1225-0562
DOI:	10.3740/mrsk.2003.13.8.485
Popis:	We have developed a new way of the constant growth technique to maintain a grating height of originally-etched V-groove of submicron gratings up to 1.5 thickness by a low pressure metalorganic chemical vapor deposition. The constant growth technique is well performed on two kinds of submicron gratings that made by holography and electron (e)-beam lithography GaAs buffer layer grown on thermally deformed submicron gratings has an important role in recovering the deformed grating profile from sinusoidal to V-shaped by reducing mass transport effects. The thermal deformation effect on submicron gratings made by e-beam lithography is less than that on submicron gratings made by holography. The constant growth technique is an important step to realize complex optoelectronic devices such as one-step grown distributed feedback lasers and two-dimensional photonic crystals.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a04c7643498b84fd9a32d7670c1e5f26 https://doi.org/10.3740/mrsk.2003.13.8.485 Zobrazit plný text záznamu