Sensitive resist systems based on acid-catalyzed polymer reactions

Autor:	Hiroshi Ito, William P. England, Mitsuru Ueda
Rok vydání:	1992
Předmět:	chemistry.chemical_classification Materials science Polymers and Plastics Depolymerization Organic Chemistry Chemical amplification Polymer Condensed Matter Physics Resist chemistry Chemical engineering Acid catalyzed Polymer chemistry Materials Chemistry
Zdroj:	Makromolekulare Chemie. Macromolecular Symposia. 53:139-149
ISSN:	0258-0322
Popis:	Acid-catalyzed polymer reactions have been successfully utilized in the design of chemical amplification resist systems for semiconductor manufacturing. In this paper are described preparation and acid-catalyzed depolymerization reactions of α-substituted polystyrenes.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::a03fca5f5377eb776459293abce93067 https://doi.org/10.1002/masy.19920530114 Zobrazit plný text záznamu Plný text