Properties of contactless and contacted charging in MEMS capacitive switches
| Autor: | A. Leuliet, E. Papandreou, Matroni Koutsoureli, Loukas Michalas, A. Ziaei, P. Martins, S. Bansropun, George J. Papaioannou |
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| Rok vydání: | 2013 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry Capacitive sensing 020208 electrical & electronic engineering Electrical engineering Charge (physics) 02 engineering and technology Dielectric 021001 nanoscience & nanotechnology Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Compensation (engineering) Dipole Electric field Moment (physics) 0202 electrical engineering electronic engineering information engineering Optoelectronics Electrical and Electronic Engineering 0210 nano-technology Safety Risk Reliability and Quality business |
| Zdroj: | Microelectronics Reliability. 53:1655-1658 |
| ISSN: | 0026-2714 |
| DOI: | 10.1016/j.microrel.2013.07.057 |
| Popis: | The dielectric charging in MEMS capacitive switches is a complex effect. The high electric field during pull-down causes intrinsic free charge migration and dipole orientation as well as charge injection. The macroscopic dipole moment of the first two mechanisms is opposite to the one arising from charge injection. This causes partial compensation hence mitigates the overall charging and increases the device lifetime. The charging due to intrinsic free charge migration and dipole orientation can be monitored under contactless electric field application in the pull-up state. The paper investigates the characteristics of contactless charging and compares them with the ones of contacted charging. The characteristics of the discharging process that follows each charging procedure are also presented. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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