Uniform large-area growth of nanotemplated high-quality monolayer MoS2
| Autor: | Leonard J. Brillson, Roland Kawakami, Justin R. Young, Matthew R. Barone, Jinsong Xu, Yunqiu Kelly Luo, Susan K. Fullerton-Shirey, Sara Mueller, Jyoti Katoch, Michael Chilcote, Thaddeus J. Asel, Ezekiel Johnston-Halperin, Jay Gupta |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
Physics and Astronomy (miscellaneous) Scanning electron microscope Nanotechnology Heterojunction 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences Stencil 0104 chemical sciences Monolayer Sapphire Surface modification 0210 nano-technology Material properties Deposition (law) |
| Zdroj: | Applied Physics Letters. 110:263103 |
| ISSN: | 1077-3118 0003-6951 |
| DOI: | 10.1063/1.4989851 |
| Popis: | Over the past decade, it has become apparent that the extreme sensitivity of 2D crystals to surface interactions presents a unique opportunity to tune material properties through surface functionalization and the mechanical assembly of 2D heterostructures. However, this opportunity carries with it a concurrent challenge: an enhanced sensitivity to surface contamination introduced by standard patterning techniques that is exacerbated by the difficulty in cleaning these atomically thin materials. Here, we report a templated MoS2 growth technique wherein Mo is deposited onto atomically stepped sapphire substrates through a SiN stencil with feature sizes down to 100 nm and subsequently sulfurized at high temperature. These films have a quality comparable to the best MoS2 prepared by other methodologies, and the thickness of the resulting MoS2 patterns can be tuned layer-by-layer by controlling the initial Mo deposition. The quality and thickness of the films are confirmed by scanning electron, scanning tunnel... |
| Databáze: | OpenAIRE |
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