LEGO Process for Mixed Power Applications: Fabrication at Low Cost of Localized Thick SOI Layers

Autor:	Christian Ganibal, Jean-Marie Dilhac, Isabelle Bertrand, Marise Bafleur, Philippe Renaud
Rok vydání:	2007
Předmět:	Engineering Fabrication business.industry Silicon on insulator High voltage Nanotechnology Hardware_PERFORMANCEANDRELIABILITY Substrate (electronics) Chip Epitaxy CMOS Hardware_INTEGRATEDCIRCUITS Optoelectronics business Voltage
Zdroj:	ECS Transactions. 6:327-332
ISSN:	1938-6737 1938-5862
DOI:	10.1149/1.2728878
Popis:	In this paper, we present the low cost fabrication process of a partial and thick silicon-on-insulator (SOI) substrate for mixed power integration (low and high voltage devices on the same chip). It is based on the Lateral Epitaxial Growth over Oxide process (LEGO). It is shown that the proposed process provides a crystalline quality compatible with a CMOS technology and high voltages devices.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9f96bf2e28fa3714cd0691fb36bb2d2f https://doi.org/10.1149/1.2728878 Zobrazit plný text záznamu