Effects of titanium and tantalum adhesion layers on the properties of sol-gel derived SrBi2Ta2O9 thin films

Autor:	Tiao-Yuan Huang, Hung Tao Lin, Chao-Hsin Chien, Ching Chich Leu, Chen Ti Hu, Ming Che Yang, Ming Jui Yang
Rok vydání:	2002
Předmět:	Materials science Annealing (metallurgy) Tantalum General Physics and Astronomy chemistry.chemical_element Thermal treatment Microstructure Electron spectroscopy Ferroelectricity Crystallography Chemical engineering chemistry Thin film Titanium
Zdroj:	Journal of Applied Physics. 92:1511-1517
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.1492015
Popis:	The effects of titanium (Ti) and tantalum (Ta) adhesion layers on the ferroelectric and microstructural properties of sol-gel-derived SrBi2Ta2O9 (SBT) films are investigated. It is found that the atoms from the adhesion layer play a significant role in the resultant microstructures and physical properties of SBT films. The electron spectroscopy for chemical analysis clearly indicates that both the Ti and Ta atoms of adhesion layers have out-diffused behavior onto the surface of bottom-electrode Pt films after a thermal treatment of 750 °C, 1 min. Various out-diffused species do cause the distinct properties of SBT films, which are confirmed by the results of surface analysis and polarization-electric field (P-E) measurements. The formation of undesirable second phase compounds near the SBT/PT interface has been observed in specimens with Ti layer, and it is speculated to be the significant degradation of spontaneous polarization. On the contrary, Ta species are found to exhibit the pure bismuth-layered st...
Databáze:	OpenAIRE
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