Photo-assisted MOVPE growth of calcium fluoride
| Autor: | K. J. Mackey, P. C. Smith, D. C. Rodway, A. W. Vere |
|---|---|
| Rok vydání: | 1989 |
| Předmět: |
Chemistry
Analytical chemistry General Physics and Astronomy chemistry.chemical_element Surfaces and Interfaces General Chemistry Condensed Matter Physics medicine.disease_cause Surfaces Coatings and Films law.invention Mercury-vapor lamp law Fluorine medicine Metalorganic vapour phase epitaxy Xenon arc lamp Emission spectrum Absorption (electromagnetic radiation) Ultraviolet Deposition (law) |
| Zdroj: | Applied Surface Science. 43:1-5 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/0169-4332(89)90181-5 |
| Popis: | We have examined the suitability of calcium hexafluoroacetylacetonate as a precursor for the photochemical deposition of CaF2 onto GaAs. Initial experiments showed that, on heating in vacuum, this compound sublimed at temperatures above 50°C, and the vapour thus produced could be decomposed thermally at a temperature of 350°C to give polycrystalline layers of CaF2. Subsequent experiments in which the vapour was subjected to radiation from a high pressure xenon arc lamp also led to the deposition of CaF2 layers at temperatures as low as 100°C. An ultraviolet absorption spectrum from the vapour at 100°C shows a strong, broad (≈ 34 nm FWHM) absorption peak centred at around 267 nm, and suggests that the compound is almost ideally suited for photolytic decomposition, using the 254 nm emission line from a mercury lamp, or broad-band ultraviolet emission from a xenon lamp. |
| Databáze: | OpenAIRE |
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