Composition, surface morphology, optical properties and Ti profile characteristics of Ti-diffused LiTaO3 strip waveguide
Autor: | Zi-Bo Zhang, Qun Zhang, Dao-Yin Yu, Wing-Han Wong, De-Long Zhang, Edwin Yue-Bun Pun, Wan-Ying Du, Hong-Xue Sun, Xiao-Fei Yang |
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Rok vydání: | 2017 |
Předmět: |
010302 applied physics
Diffraction Materials science business.industry Mechanical Engineering Metals and Alloys Physics::Optics Crystal growth 01 natural sciences Waveguide (optics) 010309 optics Crystal Secondary ion mass spectrometry Wavelength Lattice constant Optics Mechanics of Materials 0103 physical sciences X-ray crystallography Materials Chemistry Optoelectronics business |
Zdroj: | Journal of Alloys and Compounds. 695:2519-2524 |
ISSN: | 0925-8388 |
DOI: | 10.1016/j.jallcom.2016.11.154 |
Popis: | Ti-diffused LiTaO 3 strip waveguide was fabricated by in-diffusion of 8-μm-wide, 100-nm-thick Ti-strip at 1300 °C for 6 h in wet O 2 atmosphere. Its composition, surface morphology, lattice parameter, optical properties and Ti profile characteristics were fully characterized. It is shown that the waveguide is in the congruent composition environment. The waveguide surface caves in ∼70 nm below the crystal surface due to Ti-induced lattice contraction, which is verified by X-ray single-crystal diffraction. Optical characterizations show that the waveguide well supports both TE and TM single-mode propagation at the 1.5 μm wavelength, is polarization-insensitive, and has a loss of 0.4 (0.3) dB/cm for the TM (TE) mode. Secondary ion mass spectrometry analysis shows that the Ti profile follows a sum of two error functions in the width direction and a Gaussian function in the depth direction of the waveguide. |
Databáze: | OpenAIRE |
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