A microcalorimeter EDS system suitable for low acceleration voltage analysis
| Autor: | Atsushi Nagata, Keiichi Tanaka, Ikeda Masanori, Satoshi Nakayama, Akikazu Odawara, Yukari Baba |
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| Rok vydání: | 2006 |
| Předmět: |
Energy Dispersive Spectrometer
Scanning electron microscope business.industry Chemistry Detector Resolution (electron density) Surfaces and Interfaces General Chemistry Condensed Matter Physics Acceleration voltage Surfaces Coatings and Films Acceleration Optics Operating temperature Materials Chemistry business Voltage |
| Zdroj: | Surface and Interface Analysis. 38:1646-1649 |
| ISSN: | 1096-9918 0142-2421 |
| DOI: | 10.1002/sia.2408 |
| Popis: | When a scanning electron microscope (SEM) is used for analysis, a low acceleration voltage must be used to reduce damage to the sample and to obtain information near the sample surface. Here, a microcalorimeter energy dispersive spectrometer (EDS) system without external cryogen was developed to analyze material samples under low acceleration voltages ( |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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