Preparation and characterization of alumina films prepared by a novel spray pyrolysis method
| Autor: | W. Desisto, Robert Kershaw, J. O. Edwards, Kirby Dwight, Aaron Wold, C. Hannigan, Y.-T. Qian |
|---|---|
| Rok vydání: | 1990 |
| Předmět: |
Aluminium oxides
Silicon Mechanical Engineering technology industry and agriculture chemistry.chemical_element Mineralogy Crystal growth Chemical vapor deposition equipment and supplies Condensed Matter Physics chemistry Chemical engineering Mechanics of Materials Aluminium Ellipsometry General Materials Science Thin film Pyrolysis |
| Zdroj: | Materials Research Bulletin. 25:183-189 |
| ISSN: | 0025-5408 |
| DOI: | 10.1016/0025-5408(90)90044-3 |
| Popis: | Alumina thin films of 2000 A were deposited on n-type silicon wafers by a novel spray pyrolysis method. The spray solution contained an aluminum acetylacetonate complex which was characterized by NMR techniques. The deposited films of Al2O3 were homogeneous, uniform, dense and had breakdown potentials of greater than 10 V. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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