Liquid phase oxidation on InGaP and its application to InGaP/GaAs HBTs surface passivation

Autor: Kuan-Wei Lee, Po-Wen Sze, Kai-Lin Lee, Yeong-Her Wang, Mau-Phon Houng, Nan-Ying Yang
Rok vydání: 2005
Předmět:
Zdroj: International Conference on Indium Phosphide and Related Materials, 2005..
DOI: 10.1109/iciprm.2005.1517546
Popis: A liquid phase oxidation to grow native oxide film on InGaP near room temperature is investigated and characterized. The application as the surface passivation to improve the InGaP/GaAs heterojunction bipolar transistors (HBTs) performance is also demonstrated. In this work, the HBT devices with surface passivation by the native oxide exhibit 700% improvement in current gain at low collector current regimes by the reduction of surface recombination current, as compared to those without surface passivation. In addition, a larger breakdown voltage (23.5 V) and a lower base recombination current (10-12 A) are also obtained
Databáze: OpenAIRE