A hybrid aerodynamic and electrostatic atomization system for enhanced uniformity of thin film
| Autor: | Vu Dat Nguyen, Dae-Hyun Cho, Liwei Lin, Baekhoon Seong, Sangyeon Hwang, Hyung-Seok Jang, Hyungdong Lee, Doyoung Byun, Jihoon Kim |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
Fabrication business.industry Layer by layer Nanoparticle Nanotechnology 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Electrostatic spray-assisted vapour deposition eye diseases 010305 fluids & plasmas Surfaces Coatings and Films Electronic Optical and Magnetic Materials Aerodynamic force Particle image velocimetry 0103 physical sciences Optoelectronics Electrical and Electronic Engineering Thin film 0210 nano-technology business Deposition (law) Biotechnology |
| Zdroj: | Journal of Electrostatics. 87:93-101 |
| ISSN: | 0304-3886 |
| Popis: | Droplet deposition processes by the mechanisms of either aerodynamics or electrostatic spray have been widely studied in various applications such as aerosol generators, thin film coatings, and nanoparticle formations. Among the current state-of-art methodologies, air spray deposition can produce small-sized droplets without fine control on their sizes and uniformity in deposited thin films. Conventional electrospray depositions, on the other hand, can fabricate thin films with good uniform with a relatively slow deposition speed. In this paper, a hybrid mechanism by means of aerodynamic and electrostatic deposition is investigated and demonstrated to allow high throughput and improved uniformity for thin film depositions. It utilizes both the electrostatic force and aerodynamic force to atomize the liquid and control the droplet spraying process with good stability/repeatability. A uniform thin TiO2 film has been deposited as the demonstration example using this method. The velocities and trajectories of droplets during the deposition process have been characterized under different experimental parameters by using the technique of particle image velocimetry (PIV). This hybrid thin film fabrication method could be applicable in several industrial processes for better uniformity in making transparent electrodes, solar cells, displays, and automobiles. |
| Databáze: | OpenAIRE |
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