Package compatibility and substrate dependence of granular soft magnetic material CoFeHfO developed by reactive sputtering

Autor:	Ming Mao, Yongki Min, Shan X. Wang, Liangliang Li, Kyu-Pyung Hwang, Thomas Schneider, Randhir Bubber
Rok vydání:	2006
Předmět:	Materials science business.industry General Physics and Astronomy Polishing Nanotechnology Granular material Microstructure Surface coating Sputtering Chemical-mechanical planarization Magnet Optoelectronics Thin film business
Zdroj:	Journal of Applied Physics. 99:08M301
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.2158973
Popis:	Integration of magnetic passive components into package has been attracting more interests recently, but efficient package-compatible magnetic materials are needed. We have developed a package-compatible granular material, CoFeHfO, on a printed circuit board by reactive sputtering and investigated the substrate dependence of its soft magnetic property. Atomic force microscopy and grazing incidence x-ray-scattering-diffraction spectra show that a rough substrate surface degrades the magnetic property of CoFeHfO thin films with almost the same crystal microstructure. With surface planarization by chemical-mechanical polishing, soft magnetic material CoFeHfO can be realized on the package substrate. This material is promising for future applications in package.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9e86526fc6be3554648d0a2e61685d18 https://doi.org/10.1063/1.2158973 Zobrazit plný text záznamu