Characterization of Sputtering Temperature Dependence of NiCr Thin Film for Strain Gauge on Microcantilever in Tactile Sensor
| Autor: | LIQIANG GONG, Takashi ABE, Masayuki SOHGAWA |
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| Rok vydání: | 2021 |
| Zdroj: | The Proceedings of Mechanical Engineering Congress, Japan. 2021:J223-10 |
| ISSN: | 2424-2667 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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